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Plasma Monitoring with Miniature High-Resolution Spectrosco
Plasma Monitoring with Miniature High-Resolution Spectroscopy
A modular spectroscopy setup based on the Ocean Optics HR2000+ high resolution spectrometer was used to monitor changes in argon plasma emission following the introduction of different gases to a plasma chamber. The measurements were done in a closed reaction chamber with the spectrometer coupled to a fiber and cosine corrector looking through a small window in the chamber. The measurements demonstrated the viability of modular spectroscopy components to acquire plasma emission spectra in real time from a plasma chamber. Plasma characteristics determined from these emission spectra can be used for monitoring and controlling plasma-based processes
Applications and Techniques
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